Archived, see https://github.com/robert-koch-institut/COVID-19-Impfungen_in_Deutschland instead.
Original source is the RKI:
- https://www.rki.de/DE/Content/InfAZ/N/Neuartiges_Coronavirus/Daten/Impfquoten-Tab.html
- https://www.rki.de/DE/Content/InfAZ/N/Neuartiges_Coronavirus/Daten/Impfquotenmonitoring.xlsx?__blob=publicationFile
Initial collection thanks to AshOwns91 on reddit. Additional historical data thanks to archive.org and ard-data/2020-rki-impf-archive.
The date in the filename is the last modified date as saved in the file by Excel.
- https://github.com/ard-data/2020-rki-impf-archive
- Historical data from these spreadsheets in machine-readable CSV format: https://github.com/mathiasbynens/covid-19-vaccinations-germany/blob/main/data/data.csv
- Charts based on this data: https://mathiasbynens.github.io/covid-19-vaccinations-germany/
- Source of Our World in Data: https://github.com/owid/covid-19-data/tree/master/public/data/vaccinations